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Actinic Optical Dimensional Characterization of Deep-Subwavelength Nanostructures

NIST | Gaithersburg, Maryland | United States | 1 day ago

nm optical microscopy." Optics Express 21(22): 26219-26226, 2013. http://dx.doi.org/10.1364/Oe.21.026219 Optics; Semiconductors; Ultraviolet; Electromagnetic simulations; Lasers; Nanoscale