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well as their cleanroom fabrication by silicon micromachining will be investigated. The main challenges are (1) the design and modelling of new sensor topologies, (2) development of the MEMS fabrication processes, (3
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publication list; contact details of at least 2 referees an academic transcript of B.Sc. and M.Sc. education, including grades a TOEFL or IELTS score to verify sufficient mastering of the English language
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