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of a suitable SMA microrobots layout Rapid prototyping (clean room technology, e.g., optical lithography, 3D printing, laser technology) Development, characterization and control of demonstrator variants
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prototyping (optical lithography, 3D printing, laser technology) Development, characterization and control of cooling demonstrator variants Simulation-based design optimization The IMT is equipped with an array
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characterization, as stamping techniques, lithography, Raman, XPS, TGA, ssNMR, Tof-SIMS, EA, FTIR. C02 – Precision covalent chemistry for tailored mol2Dmat heterostructures (Dr. Chen) • Screening and synthesis
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tasks Further development of the sensor based on aerosol separation technique and field effect transistor Use aerosol measurement technique, electron-beam lithography and cleanroom equipmen Design of